Inventor · disambiguated record
Soo-Wan Koh
Also filed as: KOH SOO-WAN
1 granted patent·1 pending application·0 citations·filing 2014–2016
9Inventor score
Technology areasG03F
Files withSAMSUNG ELECTRONICS CO LTD2
Top patents by PatentIndex Score
2 records- 0148US9341941B2Reflective photomask blank, reflective photomask, and integrated circuit device manufactured by using reflective photomaskSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted May 17, 2016·0 cites·19 claims
- 0232US2017059984A1Photomask cleaning apparatus, method of cleaning a photomask, and method of manufacturing a semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →