Inventor · disambiguated record
Soichiro Mitsui
Also filed as: MITSUI SOICHIRO
7 granted patents·2 pending applications·55 citations·filing 1998–2011
83Inventor score
Top patents by PatentIndex Score
9 records- 0180US7704645B2Method of generating writing pattern data of mask and method of writing maskTOSHIBA KK·Filed 2005·Granted Apr 27, 2010·7 cites·22 claims
- 0267US7491959B2Defect inspection apparatusTOSHIBA KK·Filed 2006·Granted Feb 17, 2009·2 cites·12 claims
- 0367US6901314B2Alignment apparatus for substratesTOSHIBA KK·Filed 2003·Granted May 31, 2005·10 cites·20 claims
- 0463US7075621B2Alignment methodTOSHIBA KK·Filed 2004·Granted Jul 11, 2006·8 cites·20 claims
- 0562US6078641AX-ray lithography system and x-ray lithography methodTOSHIBA KK·Filed 1998·Granted Jun 20, 2000·22 cites·27 claims
- 0659US7495248B2Position detecting apparatus and position detecting methodTOSHIBA KK·Filed 2007·Granted Feb 24, 2009·5 cites·16 claims
- 0755US8779397B2Substrate cover and charged particle beam writing method using sameKAWAGUCHI MICHIHIRO·Filed 2010·Granted Jul 15, 2014·1 cites·6 claims
- 0842US2006240335A1Mask blank and process for producing and process for using the same, and mask and process for producing and process for using the sameMITSUI SOICHIRO·Filed 2006·Application pending·0 cites
- 0935US2012080825A1Imprinting lithography apparatus and imprinting lithography methodMITSUI SOICHIRO·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →