Inventor · disambiguated record

Ssutzu Chen

Also filed as: CHEN SSUTZU

1 granted patent·2 citations·filing 2020–2020

20Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG CO LTD1

Top patents by PatentIndex Score

1 record

0182US11694889B2Chemical mechanical polishing cleaning system with temperature control for defect reductionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jul 4, 2023·2 cites·20 claims

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