Inventor · disambiguated record
Stefan Burkart
Also filed as: BURKART STEFAN
5 granted patents·3 pending applications·28 citations·filing 2000–2012
75Inventor score
Top patents by PatentIndex Score
8 records- 0180US8358029B2Rotor-shaft integrated generator drive apparatusGEN ELECTRIC·Filed 2009·Granted Jan 22, 2013·19 cites·18 claims
- 0277US7880969B2Optical integrator for an illumination system of a microlithographic projection exposure apparatusZEISS CARL SMT AG·Filed 2008·Granted Feb 1, 2011·4 cites·20 claims
- 0369US8520307B2Optical integrator for an illumination system of a microlithographic projection exposure apparatusWOLF OLIVER·Filed 2010·Granted Aug 27, 2013·4 cites·48 claims
- 0461US2010007866A1Method for producing facet mirrors and projection exposure apparatusZEISS CARL SMT AG·Filed 2009·Application pending·0 cites
- 0551US8163632B2Irradiation with high energy ions for surface structuring and treatment of surface proximal sections of optical elementsWEISER MARTIN·Filed 2007·Granted Apr 24, 2012·0 cites·50 claims
- 0651US2013100426A1Method for producing facet mirrors and projection exposure apparatusZEISS CARL SMT GMBH·Filed 2012·Application pending·0 cites
- 0745US2010033696A1Method and apparatus for producing an element having at least one freeform surface having a high accuracy of form and a low surface roughnessZEISS CARL SMT AG·Filed 2009·Application pending·0 cites
- 0841US6739239B1Caston pistonBOSCH GMBH ROBERT·Filed 2000·Granted May 25, 2004·1 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →