Inventor · disambiguated record
Steve Drummond
Also filed as: DRUMMOND STEVE · DRUMMOND STEVE T
4 granted patents·4 pending applications·16 citations·filing 2006–2024
66Inventor score
Top patents by PatentIndex Score
8 records- 0181US7751172B2Sliding wafer release gripper/wafer peeling gripperAXCELIS TECH INC·Filed 2006·Granted Jul 6, 2010·11 cites·15 claims
- 0278US9711324B2Inert atmospheric pressure pre-chill and post-heatLEE WILLIAM D·Filed 2012·Granted Jul 18, 2017·5 cites·20 claims
- 0359US2025191901A1Multifaceted target for an ion sourceAXCELIS TECH INC·Filed 2024·Application pending·0 cites
- 0459US2025157775A1Fixed position filamentAXCELIS TECH INC·Filed 2024·Application pending·0 cites
- 0549US2024344716A1Temperature sensor, heating system and controllerMIXERGY LTD·Filed 2022·Application pending·0 cites
- 0646US9611540B2Electrostatic chuck shielding mechanismOTA KAN·Filed 2008·Granted Apr 4, 2017·0 cites·19 claims
- 0741US2015228514A1Multi Fluid Cooling System for Large Temperature Range ChuckAXCELIS TECH INC·Filed 2014·Application pending·0 cites
- 0839US8692215B2Heated rotary seal and bearing for chilled ion implantation systemLEE WILLIAM D·Filed 2011·Granted Apr 8, 2014·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →