Inventor · disambiguated record
Stephen A. Fine
Also filed as: FINE STEPHEN A
6 granted patents·457 citations·filing 1988–2001
88Inventor score
Top patents by PatentIndex Score
6 records- 0196US4921778APhotoresist pattern fabrication employing chemically amplified metalized materialSHIPLEY CO·Filed 1988·Granted May 1, 1990·131 cites·32 claims
- 0293US5108875APhotoresist pattern fabrication employing chemically amplified metalized materialSHIPLEY CO·Filed 1990·Granted Apr 28, 1992·102 cites·32 claims
- 0386US6224785B1Aqueous ammonium fluoride and amine containing compositions for cleaning inorganic residues on semiconductor substratesADVANCED TECH MATERIALS·Filed 1997·Granted May 1, 2001·84 cites·25 claims
- 0485US6280651B1Selective silicon oxide etchant formulation including fluoride salt, chelating agent, and glycol solventADVANCED TECH MATERIALS·Filed 1998·Granted Aug 28, 2001·69 cites·13 claims
- 0582US6383410B1Selective silicon oxide etchant formulation including fluoride salt, chelating agent, and glycol solventADVANCED TECH MATERIALS·Filed 2001·Granted May 7, 2002·24 cites·13 claims
- 0674US6211126B1Formulations including a 1, 3-dicarbonyl compound chelating agent for stripping residues from semiconductor substratesADVANCED TECH MATERIALS·Filed 1997·Granted Apr 3, 2001·47 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →