Inventor · disambiguated record
Steve S. Huang
Also filed as: HUANG STEVE S · HUANG STEVE SHOW-WU
7 granted patents·518 citations·filing 1988–1995
89Inventor score
Top patents by PatentIndex Score
7 records- 0198US4996077ADistributed ECR remote plasma processing and apparatusTEXAS INSTRUMENTS INC·Filed 1988·Granted Feb 26, 1991·230 cites·65 claims
- 0293US5262610ALow particulate reliability enhanced remote microwave plasma discharge deviceUS ARMY·Filed 1991·Granted Nov 16, 1993·86 cites·3 claims
- 0388US5389153APlasma processing system using surface wave plasma generating apparatus and methodTEXAS INSTRUMENTS INC·Filed 1993·Granted Feb 14, 1995·59 cites·20 claims
- 0482US5345534ASemiconductor wafer heater with infrared lamp module with light blocking meansTEXAS INSTRUMENTS INC·Filed 1993·Granted Sep 6, 1994·80 cites·10 claims
- 0576US4988644AMethod for etching semiconductor materials using a remote plasma generatorTEXAS INSTRUMENTS INC·Filed 1989·Granted Jan 29, 1991·48 cites·6 claims
- 0641US5760573APlasma density monitor and methodTEXAS INSTRUMENTS INC·Filed 1995·Granted Jun 2, 1998·9 cites·20 claims
- 0733US5101764AMethod and apparatus for integrating optical sensor into processorTEXAS INSTRUMENTS INC·Filed 1991·Granted Apr 7, 1992·6 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →