Inventor · disambiguated record
Steven T. Larsen
Also filed as: LARSEN STEVEN T
2 granted patents·157 citations·filing 1978–1979
69Inventor score
Files withWISCONSIN ALUMNI RES FOUND2
Top patents by PatentIndex Score
2 records- 0194US4203128AElectrostatically deformable thin silicon membranesWISCONSIN ALUMNI RES FOUND·Filed 1978·Granted May 13, 1980·122 cites·20 claims
- 0277US4234361AProcess for producing an electrostatically deformable thin silicon membranes utilizing a two-stage diffusion step to form an etchant resistant layerWISCONSIN ALUMNI RES FOUND·Filed 1979·Granted Nov 18, 1980·35 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →