Inventor · disambiguated record
Steve S. Miura
Also filed as: MIURA STEVE S
3 granted patents·92 citations·filing 1991–1992
74Inventor score
Technology areasG03F
Files withIBM3
Top patents by PatentIndex Score
3 records- 0183US5338818ASilicon containing positive resist for DUV lithographyIBM·Filed 1992·Granted Aug 16, 1994·44 cites·4 claims
- 0278US5240812ATop coat for acid catalyzed resistsIBM·Filed 1991·Granted Aug 31, 1993·35 cites·8 claims
- 0355US5362599AFast diazoquinone positive resists comprising mixed esters of 4-sulfonate and 5-sulfonate compoundsIBM·Filed 1991·Granted Nov 8, 1994·13 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →