Inventor · disambiguated record
Steve I. Petvai
Also filed as: PETVAI STEVE I
8 granted patents·224 citations·filing 1979–2000
88Inventor score
Top patents by PatentIndex Score
8 records- 0192US4278493AMethod for cleaning surfaces by ion millingIBM·Filed 1980·Granted Jul 14, 1981·56 cites·5 claims
- 0289US4248688AIon milling of thin metal filmsIBM·Filed 1979·Granted Feb 3, 1981·77 cites·9 claims
- 0383US4362611AQuadrupole R.F. sputtering system having an anode/cathode shield and a floating target shieldIBM·Filed 1981·Granted Dec 7, 1982·29 cites·12 claims
- 0472US6053984AMethod and apparatus for decomposition of silicon oxide layers for impurity analysis of silicon wafersFiled 1997·Granted Apr 25, 2000·42 cites·10 claims
- 0561US6475291B1Method and apparatus for decomposition of silicon oxide layers for impurity analysis of silicon wafersBEECH GROVE TECHNOLOGY INC·Filed 2000·Granted Nov 5, 2002·6 cites·5 claims
- 0637US5569328ASilicon semiconductor wafer testFiled 1995·Granted Oct 29, 1996·9 cites·8 claims
- 0734US6273992B1Method and apparatus for decomposition of silicon oxide layers for impurity analysis of silicon wafersFiled 2000·Granted Aug 14, 2001·2 cites·18 claims
- 0828US5481881ASystem and process for removing potential pollutants from a vapor streamFiled 1994·Granted Jan 9, 1996·3 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →