Inventor · disambiguated record

Stefan Roling

Also filed as: ROLING STEFAN

1 granted patent·2 citations·filing 2010–2010

19Inventor score

Technology areasG03F

Files withSELTMANN ROLF1

Top patents by PatentIndex Score

1 record

0163US8332783B2Control of critical dimensions in optical imaging processes for semiconductor production by extracting imaging imperfections on the basis of imaging tool specific intensity measurements and simulationsSELTMANN ROLF·Filed 2010·Granted Dec 11, 2012·2 cites·20 claims

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