Inventor · disambiguated record
Steven E. Staller
Also filed as: STALLER STEVEN E · STALLER STEVEN EDWARD
14 granted patents·3 pending applications·683 citations·filing 1990–2012
95Inventor score
Top patents by PatentIndex Score
17 records- 0194US6428713B1MEMS sensor structure and microfabrication process thereforDELPHI TECH INC·Filed 1999·Granted Aug 6, 2002·111 cites·10 claims
- 0291US5706565AMethod for making an all-silicon capacitive pressure sensorDELCO ELECTRONICS CORP·Filed 1996·Granted Jan 13, 1998·82 cites·12 claims
- 0388US6555856B1Semiconductor device with means for verifying a hermetic seal thereforDELPHI TECH INC·Filed 2000·Granted Apr 29, 2003·29 cites·9 claims
- 0488US5068203AMethod for forming thin silicon membrane or beamDELCO ELECTRONICS CORP·Filed 1990·Granted Nov 26, 1991·70 cites·8 claims
- 0587US5936164AAll-silicon capacitive pressure sensorDELCO ELECTRONICS CORP·Filed 1997·Granted Aug 10, 1999·67 cites·8 claims
- 0682US6074891AProcess for verifying a hermetic seal and semiconductor device thereforDELPHI TECH INC·Filed 1998·Granted Jun 13, 2000·51 cites·13 claims
- 0781US6750152B1Method and apparatus for electrically testing and characterizing formation of microelectric featuresDELPHI TECH INC·Filed 1999·Granted Jun 15, 2004·66 cites·16 claims
- 0878US5721162AAll-silicon monolithic motion sensor with integrated conditioning circuitDELCO ELECTRONICS CORP·Filed 1995·Granted Feb 24, 1998·41 cites·30 claims
- 0978US5413955AMethod of bonding silicon wafers at temperatures below 500 degrees centigrade for sensor applicationsDELCO ELECTRONICS CORP·Filed 1993·Granted May 9, 1995·43 cites·5 claims
- 1077US5221400AMethod of making a microaccelerometer having low stress bonds and means for preventing excessive z-axis deflectionDELCO ELECTRONICS CORP·Filed 1990·Granted Jun 22, 1993·51 cites·4 claims
- 1169US5415726AMethod of making a bridge-supported accelerometer structureDELCO ELECTRONICS CORP·Filed 1993·Granted May 16, 1995·27 cites·3 claims
- 1267US8754512B1Atomic level bonding for electronics packagingDELPHI TECH INC·Filed 2012·Granted Jun 17, 2014·2 cites·12 claims
- 1362US5284057AMicroaccelerometer having low stress bonds and means for preventing excessive Z-axis deflectionDELCO ELECTRONICS CORP·Filed 1992·Granted Feb 8, 1994·21 cites·7 claims
- 1454US5369057AMethod of making and sealing a semiconductor device having an air path therethroughDELCO ELECTRONICS CORP·Filed 1993·Granted Nov 29, 1994·22 cites·6 claims
- 1540US2007269959A1Method of aligning mask layers to buried featuresFREEMAN JOHN E·Filed 2006·Application pending·0 cites
- 1639US2002125208A1MEMS sensor structure and microfabrication process thereforDELPHI TECH INC·Filed 2002·Application pending·0 cites
- 1725US2004144162A1Process for preconditioning assembled parts for leak testingFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →