Inventor · disambiguated record
Stephen E. Vargo
Also filed as: VARGO STEPHEN · VARGO STEPHEN E · VARGO STEPHEN ERIC
4 granted patents·133 citations·filing 2000–2009
77Inventor score
Top patents by PatentIndex Score
4 records- 0195US7838322B1Method of enhancing an etch systemTESSERA MEMS TECHNOLOGIES INC·Filed 2006·Granted Nov 23, 2010·52 cites·16 claims
- 0287US6533554B1Thermal transpiration pumpUNIV SOUTHERN CALIFORNIA·Filed 2000·Granted Mar 18, 2003·70 cites·50 claims
- 0368US6546182B2Angled fiber termination and methods of making the sameSIWAVE INC·Filed 2001·Granted Apr 8, 2003·11 cites·37 claims
- 0436US8431491B2Method for membrane protection during reactive ion/plasma etching processing for via or cavity formation in semiconductor manufactureBALUT CHESTER E·Filed 2009·Granted Apr 30, 2013·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →