Inventor · disambiguated record
Susumu Aiuchi
Also filed as: AIUCHI SUSUMU
22 granted patents·1 pending application·1,254 citations·filing 1976–2003
97Inventor score
Files withHITACHI LTD23
Top patents by PatentIndex Score
23 records- 0197US4610770AMethod and apparatus for sputteringHITACHI LTD·Filed 1984·Granted Sep 9, 1986·86 cites·24 claims
- 0296US4405435AApparatus for performing continuous treatment in vacuumHITACHI LTD·Filed 1981·Granted Sep 20, 1983·171 cites·12 claims
- 0396US4401539ASputtering cathode structure for sputtering apparatuses, method of controlling magnetic flux generated by said sputtering cathode structure, and method of forming films by use of said sputtering cathode structureHITACHI LTD·Filed 1982·Granted Aug 30, 1983·90 cites·40 claims
- 0496US4391511ALight exposure device and methodHITACHI LTD·Filed 1981·Granted Jul 5, 1983·153 cites·23 claims
- 0595US4721553AMethod and apparatus for microwave assisting sputteringHITACHI LTD·Filed 1985·Granted Jan 26, 1988·100 cites·33 claims
- 0694US4615620AApparatus for measuring the depth of fine engraved patternsHITACHI LTD·Filed 1984·Granted Oct 7, 1986·56 cites·13 claims
- 0792US4808258APlasma processing method and apparatus for carrying out the sameHITACHI LTD·Filed 1984·Granted Feb 28, 1989·98 cites·30 claims
- 0890US4675096AContinuous sputtering apparatusHITACHI LTD·Filed 1984·Granted Jun 23, 1987·58 cites·9 claims
- 0989US7020306B2Polishing pad surface condition evaluation method and an apparatus thereof and a method of producing a semiconductor deviceHITACHI LTD·Filed 2001·Granted Mar 28, 2006·35 cites·11 claims
- 1089US4628531APattern checking apparatusHITACHI LTD·Filed 1984·Granted Dec 9, 1986·100 cites·9 claims
- 1186US4933565AMethod and apparatus for correcting defects of X-ray maskHITACHI LTD·Filed 1988·Granted Jun 12, 1990·43 cites·11 claims
- 1285US4925755AMethod of correcting defect in circuit patternHITACHI LTD·Filed 1988·Granted May 15, 1990·40 cites·6 claims
- 1385US4479848AEtching method and apparatusHITACHI LTD·Filed 1984·Granted Oct 30, 1984·58 cites·14 claims
- 1480US4744660AApparatus for measuring difference in shallow levelHITACHI LTD·Filed 1986·Granted May 17, 1988·36 cites·17 claims
- 1576US6539959B1Cleaning apparatus for plate-like part and method thereofHITACHI LTD·Filed 2000·Granted Apr 1, 2003·22 cites·11 claims
- 1675US4420233AProjecting apparatusHITACHI LTD·Filed 1982·Granted Dec 13, 1983·26 cites·16 claims
- 1768US6693699B2Image display device and its repairing method and apparatusHITACHI LTD·Filed 2002·Granted Feb 17, 2004·10 cites·6 claims
- 1867US4487678ADry-etching apparatusHITACHI LTD·Filed 1984·Granted Dec 11, 1984·28 cites·2 claims
- 1965US4840487AMeasuring apparatus for etching pitsHITACHI LTD·Filed 1986·Granted Jun 20, 1989·13 cites·10 claims
- 2055US4170418AAlignment apparatusHITACHI LTD·Filed 1976·Granted Oct 9, 1979·11 cites·14 claims
- 2145US6552771B1Image display device and its repairing method and apparatusHITACHI LTD·Filed 1999·Granted Apr 22, 2003·12 cites·10 claims
- 2245US4536419AMethod for forming tapered filmsHITACHI LTD·Filed 1983·Granted Aug 20, 1985·8 cites·14 claims
- 2331US2003231145A1Display apparatus for displaying property of electronic applianceHITACHI LTD·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →