Inventor · disambiguated record
Sungjun Ann
Also filed as: ANN SUNGJUN
1 granted patent·2 pending applications·0 citations·filing 2021–2024
7Inventor score
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3 records- 0163US2025285836A1Plasma deposition apparatus and plasma deposition methodSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0253US2024203710A1Cover wafer and method of cleaning substrate processing apparatus including the sameSAMSUNG ELECTONICS CO LTD·Filed 2023·Application pending·0 cites
- 0351US11658039B2Plasma etching apparatus, plasma etching method, and semiconductor device fabrication method including the plasma etching methodSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted May 23, 2023·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →