Inventor · disambiguated record
Susumu Gotoh
Also filed as: GOTOH SUSUMU
8 granted patents·435 citations·filing 1991–2004
90Inventor score
Top patents by PatentIndex Score
8 records- 0196US6323499B1Electron beam exposure apparatus and method, and device manufacturing methodCANON KK·Filed 2000·Granted Nov 27, 2001·106 cites·23 claims
- 0294US5834783AElectron beam exposure apparatus and method, and device manufacturing methodCANON KK·Filed 1997·Granted Nov 10, 1998·143 cites·63 claims
- 0389US5973332AElectron beam exposure method, and device manufacturing method using sameCANON KK·Filed 1998·Granted Oct 26, 1999·73 cites·4 claims
- 0487US6166387AElectron beam exposure apparatus and methodCANON KK·Filed 1999·Granted Dec 26, 2000·65 cites·23 claims
- 0579US5164974AX-ray exposure apparatusCANON KK·Filed 1991·Granted Nov 17, 1992·34 cites·19 claims
- 0672US6809319B2Electron beam writing equipment and electron beam writing methodHITACHI HIGH TECH CORP·Filed 2003·Granted Oct 26, 2004·8 cites·12 claims
- 0760US6838682B2Electron beam exposure equipment and electron beam exposure methodHITACHI HIGH TECH CORP·Filed 2003·Granted Jan 4, 2005·4 cites·20 claims
- 0856US7049607B2Electron beam writing equipment and electron beam writing methodCANON KK·Filed 2004·Granted May 23, 2006·2 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →