Inventor · disambiguated record
Sun-Seok Han
Also filed as: HAN SUN SEOK
4 granted patents·3 pending applications·46 citations·filing 2001–2002
73Inventor score
Files withJUSUNG ENG CO LTD5
Top patents by PatentIndex Score
7 records- 0171US6847516B2Electrostatic chuck for preventing an arcJUSUNG ENG CO LTD·Filed 2002·Granted Jan 25, 2005·16 cites·13 claims
- 0269US6770836B2Impedance matching circuit for inductively coupled plasma sourceJUSUNG ENG CO LTD·Filed 2002·Granted Aug 3, 2004·25 cites·16 claims
- 0344US6653988B2Parallel resonance whirl antennaJUSUNG ENG CO LTD·Filed 2002·Granted Nov 25, 2003·5 cites·8 claims
- 0437US2002007794A1Plasma processing apparatusFiled 2001·Application pending·0 cites
- 0534US2003066605A1Air exhaust system of a chamber for manufacturing semiconductor deviceFiled 2002·Application pending·0 cites
- 0634US2002189763A1Plasma processing apparatus having parallel resonance antenna for very high frequencyJUSUNG ENG CO LTD·Filed 2002·Application pending·0 cites
- 0733US6685800B2Apparatus for generating inductively coupled plasmaJUSUNG ENG CO LTD·Filed 2001·Granted Feb 3, 2004·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →