Inventor · disambiguated record
Suri Hedge
Also filed as: HEDGE SURI · HEDGE SURI G
4 granted patents·40 citations·filing 1998–2005
73Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0162US6379222B2Methods and apparatus for chemical mechanical planarization (CMP) of a semiconductor waferSIEMENS AG·Filed 1999·Granted Apr 30, 2002·23 cites·6 claims
- 0257US7335969B2Method of monitoring introduction of interfacial speciesIBM·Filed 2005·Granted Feb 26, 2008·1 cites·14 claims
- 0353US6020262AMethods and apparatus for chemical mechanical planarization (CMP) of a semiconductor waferSIEMENS AG·Filed 1998·Granted Feb 1, 2000·16 cites·11 claims
- 0437US6929964B2Method of monitoring introduction on interfacial speciesIBM·Filed 2003·Granted Aug 16, 2005·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →