Inventor · disambiguated record
Sung Tae Je
Also filed as: JE SUNG-TAE
22 granted patents·5 pending applications·80 citations·filing 2009–2018
93Inventor score
Top patents by PatentIndex Score
27 records- 0194US8771418B2Substrate-processing apparatus and substrate-processing method for selectively inserting diffusion platesJE SUNG TAE·Filed 2010·Granted Jul 8, 2014·20 cites·11 claims
- 0291US10337103B2Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2016·Granted Jul 2, 2019·5 cites·5 claims
- 0391US10145012B2Substrate processing apparatus and substrate processing methodEUGENE TECHNOLOGY CO LTD·Filed 2014·Granted Dec 4, 2018·12 cites·11 claims
- 0490US10161036B2Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2016·Granted Dec 25, 2018·4 cites·9 claims
- 0587US9620395B2Apparatus for processing substrate for supplying reaction gas having phase differenceEUGENE TECHNOLOGY CO LTD·Filed 2012·Granted Apr 11, 2017·9 cites·11 claims
- 0684US9593415B2Substrate processing apparatus including auxiliary gas supply portEUGENE TECHNOLOGY CO LTD·Filed 2012·Granted Mar 14, 2017·7 cites·10 claims
- 0782US9875895B2Substrate processing apparatus including exhaust ports and substrate processing methodEUGENE TECHNOLOGY CO LTD·Filed 2012·Granted Jan 23, 2018·5 cites·3 claims
- 0881US10741396B2Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2016·Granted Aug 11, 2020·4 cites·9 claims
- 0979US10840118B2Substrate processing apparatus and method for assembling tube assemblyEUGENE TECHNOLOGY CO LTD·Filed 2016·Granted Nov 17, 2020·3 cites·8 claims
- 1076US10287687B2Substrate processing deviceEUGENE TECHNOLOGY CO LTD·Filed 2014·Granted May 14, 2019·3 cites·7 claims
- 1174US10192760B2Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unitEUGENE TECHNOLOGY CO LTD·Filed 2015·Granted Jan 29, 2019·2 cites·3 claims
- 1274US9758870B2Substrate treatment apparatus, and method for controlling temperature of heaterEUGENE TECHNOLOGY CO LTD·Filed 2013·Granted Sep 12, 2017·3 cites·8 claims
- 1373US10364494B2Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2016·Granted Jul 30, 2019·2 cites·13 claims
- 1461US9953850B2Substrate processing apparatus including heat-shield plateEUGENE TECHNOLOGY CO LTD·Filed 2012·Granted Apr 24, 2018·1 cites·4 claims
- 1549US10593545B2Method for substrate processing using exhaust portsEUGENE TECHNOLOGY CO LTD·Filed 2017·Granted Mar 17, 2020·0 cites·3 claims
- 1647US10622228B2Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unitEUGENE TECHNOLOGY CO LTD·Filed 2016·Granted Apr 14, 2020·0 cites·7 claims
- 1746US8528499B2Substrate processing apparatus and methodJE SUNG-TAE·Filed 2009·Granted Sep 10, 2013·0 cites·5 claims
- 1844US2010319855A1Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unitEUGENE TECHNOLOGY CO LTD·Filed 2009·Application pending·0 cites
- 1935US11242601B2Showerhead and substrate processing apparatus including the sameEUGENE TECHNOLOGY CO LTD·Filed 2018·Granted Feb 8, 2022·0 cites·10 claims
- 2035US10793949B2Substrate processing apparatus and substrate processing method using the sameEUGENE TECHNOLOGY CO LTD·Filed 2016·Granted Oct 6, 2020·0 cites·9 claims
- 2135US10199225B2Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2016·Granted Feb 5, 2019·0 cites·11 claims
- 2234US11488845B2Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2016·Granted Nov 1, 2022·0 cites·16 claims
- 2334US2013149078A1Substrate-processing apparatus and substrate-transferring methodJE SUNG TAE·Filed 2011·Application pending·0 cites
- 2434US2012160419A1Substrate-supporting unit and substrate-processing apparatus comprising sameLEE DONG-KEUN·Filed 2010·Application pending·0 cites
- 2533US2018105933A1Substrate processing apparatus and method for cleaning chamberEUGENE TECHNOLOGY CO LTD·Filed 2016·Application pending·0 cites
- 2630US9416451B2Substrate processing device equipped with semicircle shaped antennaJE SUNG TAE·Filed 2011·Granted Aug 16, 2016·0 cites·7 claims
- 2730US2013186337A1Substrate processing device for supplying reaction gas through symmetry-type inlet and outletJE SUNG TAE·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →