Inventor · disambiguated record
Sung-Weon Lee
Also filed as: LEE SUNG WEON
5 granted patents·2 pending applications·79 citations·filing 2001–2002
79Inventor score
Files withJUSUNG ENG CO LTD6
Top patents by PatentIndex Score
7 records- 0183US6530993B2Cluster tool for fabricating semiconductor deviceJUSUNG ENG CO LTD·Filed 2001·Granted Mar 11, 2003·33 cites·17 claims
- 0271US6847516B2Electrostatic chuck for preventing an arcJUSUNG ENG CO LTD·Filed 2002·Granted Jan 25, 2005·16 cites·13 claims
- 0369US6770836B2Impedance matching circuit for inductively coupled plasma sourceJUSUNG ENG CO LTD·Filed 2002·Granted Aug 3, 2004·25 cites·16 claims
- 0444US6653988B2Parallel resonance whirl antennaJUSUNG ENG CO LTD·Filed 2002·Granted Nov 25, 2003·5 cites·8 claims
- 0537US2002007794A1Plasma processing apparatusFiled 2001·Application pending·0 cites
- 0634US2002189763A1Plasma processing apparatus having parallel resonance antenna for very high frequencyJUSUNG ENG CO LTD·Filed 2002·Application pending·0 cites
- 0733US6685800B2Apparatus for generating inductively coupled plasmaJUSUNG ENG CO LTD·Filed 2001·Granted Feb 3, 2004·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →