Inventor · disambiguated record
Sungmin Nam
Also filed as: NAM SUNGMIN
0 granted patents·3 pending applications·0 citations·filing 2024–2024
Files withSAMSUNG ELECTRONICS CO LTD3
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3 records- 0167US2025138434A1Method of configuring extreme ultra-violet (euv) illumination system, and euv exposure method using the euv illumination systemSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0265US2025224664A1Device for optimizing source mask and lithography system including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0354US2025138431A1Method of configuring extreme ultra-violet (euv) light source and euv exposure method using the euv light sourceSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →