Inventor · disambiguated record
Su-Kwang Noh
Also filed as: NOH SU-KWANG
2 granted patents·34 citations·filing 1997–1998
63Inventor score
Technology areasH10P
Files withSAMSUNG ELECTRONICS CO LTD2
Top patents by PatentIndex Score
2 records- 0162US5972161ADry etcher apparatus for preventing residual reaction gas from condensing on wafers after etchingSAMSUNG ELECTRONICS CO LTD·Filed 1997·Granted Oct 26, 1999·25 cites·4 claims
- 0242US6073636ADry etcher apparatus and method of preventing residual reaction gas from condensing on wafers after etchingSAMSUNG ELECTRONICS CO LTD·Filed 1998·Granted Jun 13, 2000·9 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →