Inventor · disambiguated record
Sung Moon Park
Also filed as: PARK SUNG MOON
4 granted patents·1 pending application·1 citations·filing 2016–2022
57Inventor score
Files withSAMSUNG ELECTRONICS CO LTD5
Top patents by PatentIndex Score
5 records- 0174US11018046B2Substrate processing apparatus including edge ringSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted May 25, 2021·1 cites·13 claims
- 0264US12125685B2Plasma processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Oct 22, 2024·0 cites·14 claims
- 0361US11837496B2Substrate processing apparatus and method of processing a substrateSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Dec 5, 2023·0 cites·5 claims
- 0451US2020258753A1Plasma processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2019·Application pending·0 cites
- 0540US9812293B2Dielectric window, plasma processing system including the window, and method of fabricating semiconductor device using the systemSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Nov 7, 2017·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →