Inventor · disambiguated record
Sylvie Charpenay
Also filed as: CHARPENAY SYLVIE
2 granted patents·85 citations·filing 1998–2000
66Inventor score
Files withMKS INSTR INC2
Top patents by PatentIndex Score
2 records- 0187US6485872B1Method and apparatus for measuring the composition and other properties of thin films utilizing infrared radiationMKS INSTR INC·Filed 2000·Granted Nov 26, 2002·66 cites·32 claims
- 0246US7155363B1Thermal imaging for semiconductor process monitoringMKS INSTR INC·Filed 1998·Granted Dec 26, 2006·19 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →