Inventor · disambiguated record
Sylvia Marci Luque
Also filed as: LUQUE SYLVIA M · LUQUE SYLVIA MARCI
3 granted patents·57 citations·filing 1999–2000
73Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0173US6566269B1Removal of post etch residuals on wafer surfaceLUCENT TECHNOLOGIES INC·Filed 2000·Granted May 20, 2003·25 cites·20 claims
- 0251US6406999B1Semiconductor device having reduced line width variations between tightly spaced and isolated featuresAGERE SYST GUARDIAN CORP·Filed 1999·Granted Jun 18, 2002·17 cites·15 claims
- 0348US6395639B1Process for improving line width variations between tightly spaced and isolated features in integrated circuitsAGERE SYST GUARDIAN CORP·Filed 1999·Granted May 28, 2002·15 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →