Inventor · disambiguated record
Sz-Fan Chen
Also filed as: CHEN SZ-FAN
8 granted patents·2 pending applications·5 citations·filing 2017–2025
78Inventor score
Technology areasH10P
Files withTAIWAN SEMICONDUCTOR MFG CO LTD10
Top patents by PatentIndex Score
10 records- 0194US11916022B2Photolithography alignment process for bonded wafersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Feb 27, 2024·2 cites·20 claims
- 0293US12165867B2Method for reducing charging of semiconductor wafersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Dec 10, 2024·1 cites·20 claims
- 0392US11769662B2Method for reducing charging of semiconductor wafersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Sep 26, 2023·2 cites·20 claims
- 0482US12230585B2Photolithography alignment process for bonded wafersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Feb 18, 2025·0 cites·20 claims
- 0580US2025069881A1Method for reducing charging of semiconductor wafersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0675US11665897B2Improving surface topography by forming spacer-like componentsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted May 30, 2023·0 cites·20 claims
- 0771US2025157943A1Photolithography alignment process for bonded wafersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0865US11276699B2Surface topography by forming spacer-like componentsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Mar 15, 2022·0 cites·20 claims
- 0957US10522557B2Surface topography by forming spacer-like componentsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Dec 31, 2019·0 cites·20 claims
- 1052US11362038B2Photolithography alignment process for bonded wafersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jun 14, 2022·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →