Inventor · disambiguated record

Szu-Che Tsai

Also filed as: TSAI SZU-CHE

1 granted patent·10 citations·filing 1999–1999

33Inventor score

Technology areasH01J

Files withTSAI CHUEN HORNG1

Top patents by PatentIndex Score

1 record

0138US6150763AInductively-coupled high density plasma producing apparatus and plasma processing equipment provided with the sameTSAI CHUEN HORNG·Filed 1999·Granted Nov 21, 2000·10 cites·7 claims

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