Inventor · disambiguated record

Sze-Au Wu

Also filed as: WU SZE-AU

1 granted patent·18 citations·filing 2002–2002

39Inventor score

Technology areasC23C

Files withTAIWAN SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

1 record

0173US7296532B2Bypass gas feed system and method to improve reactant gas flow and film depositionTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Nov 20, 2007·18 cites·19 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →