Inventor · disambiguated record
Takahiro Akamatsu
Also filed as: AKAMATSU TAKAHIRO
8 granted patents·347 citations·filing 1986–2007
89Inventor score
Files withCANON KK8
Top patents by PatentIndex Score
8 records- 0195US7256868B2Projection exposure apparatus, device manufacturing method, and sensor unitCANON KK·Filed 2005·Granted Aug 14, 2007·31 cites·6 claims
- 0293US4887904ADevice for positioning a semi-conductor waferCANON KK·Filed 1988·Granted Dec 19, 1989·136 cites·15 claims
- 0390US7522264B2Projection exposure apparatus, device manufacturing method, and sensor unitCANON KK·Filed 2007·Granted Apr 21, 2009·12 cites·18 claims
- 0490US5162642ADevice for detecting the position of a surfaceCANON KK·Filed 1991·Granted Nov 10, 1992·75 cites·11 claims
- 0583US4853880ADevice for positioning a semi-conductor waferCANON KK·Filed 1986·Granted Aug 1, 1989·37 cites·4 claims
- 0671US5258823AAlignment systemCANON KK·Filed 1991·Granted Nov 2, 1993·52 cites·5 claims
- 0753US7027079B2Exposure apparatus including a read circuit for reading electrical signals from a plurality of photoelectric convertersCANON KK·Filed 2003·Granted Apr 11, 2006·4 cites·3 claims
- 0844US7154524B2Exposure apparatus including a controller configured to read electrical signals from an array of photoelectric convertersCANON KK·Filed 2005·Granted Dec 26, 2006·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →