Inventor · disambiguated record
Ta-Chin Chen
Also filed as: CHEN TA-CHIN
1 granted patent·2 pending applications·32 citations·filing 1999–2005
45Inventor score
Top patents by PatentIndex Score
3 records- 0167US6325948B1Waferless clean process of a dry etcherLAM RES CO LTD·Filed 1999·Granted Dec 4, 2001·32 cites·9 claims
- 0228US2002074014A1Method for cleaning a metal etching chamberFiled 2001·Application pending·0 cites
- 0328US2005269293A1Seasoning method for etch chamberFAN CHEN-LUNG·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →