Inventor · disambiguated record
Tai Hoshi
Also filed as: HOSHI TAI
6 granted patents·123 citations·filing 1983–2002
85Inventor score
Top patents by PatentIndex Score
6 records- 0180US4598197AProjection alignerHITACHI LTD·Filed 1983·Granted Jul 1, 1986·41 cites·16 claims
- 0276US7212286B2Aligning method, exposure method, exposure apparatus, and device manufacturing methodCANON KK·Filed 2002·Granted May 1, 2007·16 cites·10 claims
- 0367US6399283B1Exposure method and alignerCANON KK·Filed 1999·Granted Jun 4, 2002·27 cites·15 claims
- 0460US6876435B2Exposure method, plane alignment method, exposure apparatus, and device manufacturing methodCANON KK·Filed 2002·Granted Apr 5, 2005·6 cites·14 claims
- 0557US4701608AProjection aligner with a sensor for monitoring light quantityHITACHI LTD·Filed 1986·Granted Oct 20, 1987·19 cites·21 claims
- 0649US4780606AProjection aligner method utilizing monitoring of light quantityHITACHI LTD·Filed 1987·Granted Oct 25, 1988·14 cites·29 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →