Inventor · disambiguated record
Takehiko Iwanaga
Also filed as: IWANAGA TAKEHIKO
10 granted patents·1 pending application·159 citations·filing 1993–2014
89Inventor score
Files withCANON KK11
Top patents by PatentIndex Score
11 records- 0176US5581348ASurface inspecting device using bisected multi-mode laser beam and system having the sameCANON KK·Filed 1996·Granted Dec 3, 1996·46 cites·15 claims
- 0273US5920398ASurface position detecting method and scanning exposure method using the sameCANON KK·Filed 1997·Granted Jul 6, 1999·43 cites·16 claims
- 0372US6396562B1Microdevice manufacturing apparatusCANON KK·Filed 1999·Granted May 28, 2002·32 cites·11 claims
- 0467US5347118AAligning method and apparatus detecting misalignment using image signals from image pickupCANON KK·Filed 1993·Granted Sep 13, 1994·21 cites·12 claims
- 0555US6909372B2Power monitoring unit, control method therefor, and exposure apparatusCANON KK·Filed 2003·Granted Jun 21, 2005·7 cites·17 claims
- 0655US6816239B2Exposure apparatus, method of controlling same, and method of manufacturing devicesCANON KK·Filed 2002·Granted Nov 9, 2004·3 cites·33 claims
- 0754US6788391B2Illumination device, exposure apparatus and exposure methodCANON KK·Filed 2002·Granted Sep 7, 2004·4 cites·32 claims
- 0850US7046336B2Scanning exposure apparatusCANON KK·Filed 2005·Granted May 16, 2006·0 cites·18 claims
- 0950US6954259B2Scanning exposure apparatusCANON KK·Filed 2004·Granted Oct 11, 2005·2 cites·4 claims
- 1047US7072027B2Exposure apparatus, method of controlling same, and method of manufacturing devicesCANON KK·Filed 2004·Granted Jul 4, 2006·1 cites·10 claims
- 1146US2015004275A1MoldCANON KK·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →