Inventor · disambiguated record
Takamitsu Kawahara
Also filed as: KAWAHARA TAKAMITSU
16 granted patents·2 pending applications·174 citations·filing 1997–2015
93Inventor score
Top patents by PatentIndex Score
18 records- 0190US6703288B2Compound crystal and method of manufacturing sameHOYA CORP·Filed 2002·Granted Mar 9, 2004·29 cites·2 claims
- 0288US6736894B2Method of manufacturing compound single crystalHOYA CORP·Filed 2002·Granted May 18, 2004·29 cites·7 claims
- 0387US6416578B1Silicon carbide film and method for manufacturing the sameHOYA CORP·Filed 2000·Granted Jul 9, 2002·31 cites·9 claims
- 0478US6596080B2Silicon carbide and method for producing the sameHOYA CORP·Filed 2001·Granted Jul 22, 2003·14 cites·14 claims
- 0576US6475456B2Silicon carbide film and method for manufacturing the sameHOYA CORP·Filed 2001·Granted Nov 5, 2002·14 cites·8 claims
- 0675US6821340B2Method of manufacturing silicon carbide, silicon carbide, composite material, and semiconductor elementHOYA CORP·Filed 2001·Granted Nov 23, 2004·12 cites·14 claims
- 0771US7101774B2Method of manufacturing compound single crystalHOYA CORP·Filed 2002·Granted Sep 5, 2006·8 cites·7 claims
- 0868US9761479B2Manufacturing method for semiconductor substrateTOYOTA JIDOSHOKKI KK·Filed 2014·Granted Sep 12, 2017·2 cites·16 claims
- 0968US8890170B2Silicon carbide substrate, semiconductor device and method for manufacturing silicon carbide substrateNAGASAWA HIROYUKI·Filed 2011·Granted Nov 18, 2014·2 cites·9 claims
- 1063US9773678B2Semiconductor substrate and method for manufacturing semiconductor substrateTOYOTA JIDOSHOKKI KK·Filed 2015·Granted Sep 26, 2017·1 cites·19 claims
- 1163US8133321B2Process for producing silicon carbide single crystalKAWAHARA TAKAMITSU·Filed 2006·Granted Mar 13, 2012·1 cites·16 claims
- 1256US7211337B2Compound crystal and method of manufacturing sameHOYA CORP·Filed 2003·Granted May 1, 2007·2 cites·13 claims
- 1356US6128363AX-ray mask blank, x-ray mask, and pattern transfer methodHOYA CORP·Filed 1997·Granted Oct 3, 2000·17 cites·13 claims
- 1447US2011006310A1Semiconductor device and semiconductor device manufacturing methodHOYA CORP·Filed 2008·Application pending·0 cites
- 1539US5999590AX-ray mask blank and manufacturing method for the same, and manufacturing method for X-ray maskHOYA CORP·Filed 1997·Granted Dec 7, 1999·5 cites·10 claims
- 1637US5848120AX-ray mask blank, X-ray mask and pattern transfer methodHOYA CORP·Filed 1997·Granted Dec 8, 1998·4 cites·11 claims
- 1737US2003056718A1Method of manufacturing single crystal substrateHOYA CORP·Filed 2002·Application pending·0 cites
- 1834US6317480B1Method of manufacturing X-ray mask and X-ray mask blank, and X-ray mask and X-ray mask blank manufactured therebyHOYA CORP·Filed 1999·Granted Nov 13, 2001·3 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →