Inventor · disambiguated record
Takahisa Kikuchi
Also filed as: KIKUCHI TAKAHISA
2 granted patents·3 pending applications·52 citations·filing 2000–2008
64Inventor score
Technology areasG03F
Files withNIKON CORP5
Top patents by PatentIndex Score
5 records- 0187US6813004B1Exposure method, exposure apparatus and making method of the apparatus, and device and manufacturing method of the deviceNIKON CORP·Filed 2000·Granted Nov 2, 2004·37 cites·51 claims
- 0270US7817242B2Exposure method and device manufacturing method, exposure apparatus, and programNIKON CORP·Filed 2004·Granted Oct 19, 2010·15 cites·19 claims
- 0341US2009174873A1Exposure apparatus, exposure method and device manufacturing methodNIKON CORP·Filed 2008·Application pending·0 cites
- 0435US2004126004A1Evaluation method, position detection method, exposure method and device manufacturing method, and exposure apparatusNIKON CORP·Filed 2003·Application pending·0 cites
- 0532US2002042664A1Evaluation method, position detection method, exposure method and device manufacturing method, and exposure apparatusNIKON CORP·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →