Inventor · disambiguated record
Takio Kizu
Also filed as: KIZU TAKIO
1 granted patent·1 pending application·0 citations·filing 2019–2020
10Inventor score
Files withAIR LIQUIDE2
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2 records- 0147US12368042B2Precursors and processes for deposition of Si-containing films using ALD at temperature of 550° C. or higherAIR LIQUIDE·Filed 2019·Granted Jul 22, 2025·0 cites·14 claims
- 0243US2021032275A1Cyclic germanium silylamido precursors for ge-containing film depositions and methods of using the sameAIR LIQUIDE·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →