Inventor · disambiguated record
Takao Kumihashi
Also filed as: KUMIHASHI TAKAO
18 granted patents·1 pending application·1,018 citations·filing 1992–2015
96Inventor score
Top patents by PatentIndex Score
19 records- 0198US5242539APlasma treatment method and apparatusHITACHI LTD·Filed 1992·Granted Sep 7, 1993·602 cites·76 claims
- 0295US9240330B2Method of manufacturing a semiconductor integrated circuit deviceRENESAS ELECTRONICS CORP·Filed 2013·Granted Jan 19, 2016·21 cites·18 claims
- 0392US5368685ADry etching apparatus and methodHITACHI LTD·Filed 1993·Granted Nov 29, 1994·148 cites·21 claims
- 0488US6479380B2Semiconductor device and manufacturing method thereofHITACHI LTD·Filed 2001·Granted Nov 12, 2002·36 cites·22 claims
- 0586US6497992B1Process for manufacturing semiconductor integrated circuit deviceHITACHI LTD·Filed 2000·Granted Dec 24, 2002·32 cites·7 claims
- 0679US6057081AProcess for manufacturing semiconductor integrated circuit deviceHITACHI LTD·Filed 1997·Granted May 2, 2000·50 cites·60 claims
- 0775US6562722B2Method and apparatus for dry etchingHITACHI LTD·Filed 2001·Granted May 13, 2003·11 cites·9 claims
- 0874US5474650AMethod and apparatus for dry etchingHITACHI LTD·Filed 1994·Granted Dec 12, 1995·39 cites·14 claims
- 0968US6599830B2Semiconductor device and manufacturing method thereofHITACHI LTD·Filed 2002·Granted Jul 29, 2003·10 cites·38 claims
- 1067US6136721AMethod and apparatus for dry etchingHITACHI LTD·Filed 2000·Granted Oct 24, 2000·7 cites·18 claims
- 1165US6333273B1Method and apparatus for dry etchingHITACHI LTD·Filed 2000·Granted Dec 25, 2001·6 cites·18 claims
- 1253US5318667AMethod and apparatus for dry etchingHITACHI LTD·Filed 1993·Granted Jun 7, 1994·18 cites·4 claims
- 1346US2016093555A1Method of manufacturing a semiconductor integrated circuit deviceRENESAS ELECTRONICS CORP·Filed 2015·Application pending·0 cites
- 1444US7071114B2Method and apparatus for dry etchingHITACHI LTD·Filed 2003·Granted Jul 4, 2006·0 cites·4 claims
- 1543US6008133AMethod and apparatus for dry etchingHITACHI LTD·Filed 1998·Granted Dec 28, 1999·6 cites·8 claims
- 1643US5409562ADry-etching method and apparatusHITACHI LTD·Filed 1992·Granted Apr 25, 1995·13 cites·30 claims
- 1741US5650038AMethod for dry etchingHITACHI LTD·Filed 1995·Granted Jul 22, 1997·6 cites·4 claims
- 1839US5795832AMethod and apparatus for dry etchingHITACHI LTD·Filed 1997·Granted Aug 18, 1998·5 cites·5 claims
- 1939US5354418AMethod for dry etchingHITACHI LTD·Filed 1994·Granted Oct 11, 1994·8 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →