Inventor · disambiguated record
Tadao Kusaka
Also filed as: KUSAKA TADAO
2 granted patents·84 citations·filing 1987–1989
68Inventor score
Files withHITACHI LTD2
Top patents by PatentIndex Score
2 records- 0185US5062771AVacuum system with a secondary gas also connected to the roughing pump for a semiconductor processing chamberHITACHI LTD·Filed 1989·Granted Nov 5, 1991·48 cites·52 claims
- 0278US4835114AMethod for LPCVD of semiconductors using oil free vacuum pumpsHITACHI LTD·Filed 1987·Granted May 30, 1989·36 cites·16 claims
Join the waitlist — get patent alerts
Get an alert when Tadao Kusaka files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →