Inventor · disambiguated record
Takuya Matsukawa
Also filed as: MATSUKAWA TAKUYA
3 granted patents·2 pending applications·17 citations·filing 2007–2025
64Inventor score
Top patents by PatentIndex Score
5 records- 0182US7589335B2Charged-particle beam pattern writing method and apparatus and software program for use thereinNUFLARE TECHNOLOGY INC·Filed 2007·Granted Sep 15, 2009·12 cites·14 claims
- 0269US7598504B2Writing error diagnosis method for charged particle beam photolithography apparatus and charged particle beam photolithography apparatusNUFLARE TECHNOLOGY INC·Filed 2007·Granted Oct 6, 2009·4 cites·20 claims
- 0363US2025295595A1Film coating composition and solid preparationSAWAI SEIYAKU KK·Filed 2025·Application pending·0 cites
- 0461US7900185B2Pattern writing circuit self-diagnosis method for charged beam photolithography apparatus and charged beam photolithography apparatusNUFLARE TECHNOLOGY INC·Filed 2007·Granted Mar 1, 2011·1 cites·20 claims
- 0559US2021393534A1Film coating composition and solid preparationSAWAI SEIYAKU KK·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →