Inventor · disambiguated record
Tadashi Nagayama
Also filed as: NAGAYAMA TADASHI
15 granted patents·4 pending applications·309 citations·filing 1995–2019
93Inventor score
Top patents by PatentIndex Score
19 records- 0192US5754299AInspection apparatus and method for optical system, exposure apparatus provided with the inspection apparatus, and alignment apparatus and optical system thereof applicable to the exposure apparatusNIKON CORP·Filed 1996·Granted May 19, 1998·101 cites·56 claims
- 0291US5680200AInspection apparatus and method for optical system, exposure apparatus provided with the inspection apparatus, and alignment apparatus and optical system thereof applicable to the exposure apparatusNIKON CORP·Filed 1996·Granted Oct 21, 1997·89 cites·34 claims
- 0380US9927713B2Surface position detection apparatus, exposure apparatus, and exposure methodNIKON CORP·Filed 2016·Granted Mar 27, 2018·1 cites·27 claims
- 0480US8130361B2Exposure apparatus, exposure method, and method for producing deviceYASUDA MASAHIKO·Filed 2006·Granted Mar 6, 2012·4 cites·72 claims
- 0579US8149382B2Surface position detection apparatus, exposure apparatus, and exposure methodHIDAKA YASUHIRO·Filed 2006·Granted Apr 3, 2012·3 cites·10 claims
- 0677US10209623B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2016·Granted Feb 19, 2019·1 cites·91 claims
- 0777US5798838AProjection exposure apparatus having function of detecting intensity distribution of spatial image, and method of detecting the sameNIKON CORP·Filed 1996·Granted Aug 25, 1998·40 cites·26 claims
- 0876US8384875B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2009·Granted Feb 26, 2013·4 cites·40 claims
- 0974US9383656B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2015·Granted Jul 5, 2016·1 cites·44 claims
- 1073US9063438B2Exposure apparatus, exposure method, and method for producing deviceYASUDA MASAHIKO·Filed 2012·Granted Jun 23, 2015·1 cites·41 claims
- 1168US9519223B2Surface position detection apparatus, exposure apparatus, and exposure methodNIKON CORP·Filed 2015·Granted Dec 13, 2016·1 cites·25 claims
- 1266US2019155168A1Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2019·Application pending·0 cites
- 1365US5552892AIllumination optical system, alignment apparatus, and projection exposure apparatus using the sameNIKON CORP·Filed 1995·Granted Sep 3, 1996·23 cites·10 claims
- 1464US2018188657A1Surface position detection apparatus, exposure apparatus, and exposure methodNIKON CORP·Filed 2018·Application pending·0 cites
- 1562US5872618AProjection exposure apparatusNIKON CORP·Filed 1997·Granted Feb 16, 1999·22 cites·31 claims
- 1662US5797674AIllumination optical system, alignment apparatus, and projection exposure apparatus using the sameNIKON CORP·Filed 1996·Granted Aug 25, 1998·18 cites·8 claims
- 1758US9069261B2Surface position detection apparatus, exposure apparatus, and exposure methodHIDAKA YASUHIRO·Filed 2012·Granted Jun 30, 2015·0 cites·39 claims
- 1846US2009123874A1Exposure method, exposure apparatus, and method for manufacturing deviceNAGAYAMA TADASHI·Filed 2008·Application pending·0 cites
- 1935US2004027549A1Observation apparatus and method of manufacturing the same, exposure apparatus, and method of manufacturing microdeviceFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →