Inventor · disambiguated record
Tadao Nakatsuka
Also filed as: NAKATSUKA TADAO
4 granted patents·76 citations·filing 1995–1999
77Inventor score
Technology areasH10P
Files withSUMITOMO METAL IND4
Top patents by PatentIndex Score
4 records- 0182US5885472AMethod for detecting etching endpoint, and etching apparatus and etching system using the method thereofSUMITOMO METAL IND·Filed 1996·Granted Mar 23, 1999·53 cites·8 claims
- 0256US5626714AMethod for detecting etching endpoint and etching apparatus and etching system using the method thereofSUMITOMO METAL IND·Filed 1995·Granted May 6, 1997·17 cites·2 claims
- 0336US6669810B1Method for detecting etching endpoint, and etching apparatus and etching system using the method thereofSUMITOMO METAL IND·Filed 1998·Granted Dec 30, 2003·4 cites·5 claims
- 0431US6149761AEtching apparatus and etching system using the method thereofSUMITOMO METAL IND·Filed 1999·Granted Nov 21, 2000·2 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →