Inventor · disambiguated record
Taro Ogata
Also filed as: OGATA TARO
6 granted patents·269 citations·filing 1998–2003
87Inventor score
Files withNIKON CORP6
Top patents by PatentIndex Score
6 records- 0196US6268904B1Optical exposure apparatus and photo-cleaning methodNIKON CORP·Filed 1998·Granted Jul 31, 2001·146 cites·41 claims
- 0290US6411368B1Projection exposure method, projection exposure apparatus, and methods of manufacturing and optically cleaning the exposure apparatusNIKON CORP·Filed 2000·Granted Jun 25, 2002·53 cites·61 claims
- 0383US6642994B2Optical exposure apparatus and photo-cleaning methodNIKON CORP·Filed 2001·Granted Nov 4, 2003·19 cites·42 claims
- 0479US6538722B2Projection exposure method, projection exposure apparatus, and methods of manufacturing and optically cleaning the exposure apparatusNIKON CORP·Filed 2002·Granted Mar 25, 2003·21 cites·25 claims
- 0574US6492649B1Projection exposure apparatus, projection exposure method, optical cleaning method and method of fabricating semiconductor deviceNIKON CORP·Filed 2000·Granted Dec 10, 2002·18 cites·61 claims
- 0672US6961114B2Optical apparatus and exposure apparatus incorporating the apparatusNIKON CORP·Filed 2003·Granted Nov 1, 2005·12 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →