Inventor · disambiguated record
Tadayoshi Okuya
Also filed as: OKUYA TADAYOSHI
4 granted patents·26 citations·filing 2001–2003
72Inventor score
Files withSPEEDFAM CO LTD4
Top patents by PatentIndex Score
4 records- 0165US6875701B2Nanotopography removing methodSPEEDFAM CO LTD·Filed 2002·Granted Apr 5, 2005·11 cites·4 claims
- 0263US6649528B2Local dry etching methodSPEEDFAM CO LTD·Filed 2002·Granted Nov 18, 2003·10 cites·2 claims
- 0352US7094355B2Local dry etching methodSPEEDFAM CO LTD·Filed 2003·Granted Aug 22, 2006·4 cites·6 claims
- 0443US6429399B2Discharge tube for a local etching apparatus and a local etching apparatus using the discharge tubeSPEEDFAM CO LTD·Filed 2001·Granted Aug 6, 2002·1 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →