Inventor · disambiguated record
Tadashi Sawayama
Also filed as: SAWAYAMA TADASHI
21 granted patents·11 pending applications·191 citations·filing 1997–2014
95Inventor score
Top patents by PatentIndex Score
32 records- 0193US9054243B2Solid-state image sensor and imaging systemCANON KK·Filed 2013·Granted Jun 9, 2015·9 cites·17 claims
- 0293US8773558B2Photoelectric conversion element, and photoelectric conversion apparatus and image sensing systemKATO TARO·Filed 2012·Granted Jul 8, 2014·9 cites·47 claims
- 0384US9224777B2Solid-state image pickup device and method for manufacturing solid-state image pickup deviceSAWAYAMA TADASHI·Filed 2012·Granted Dec 29, 2015·4 cites·10 claims
- 0483US9391227B2Manufacturing method of semiconductor deviceCANON KK·Filed 2013·Granted Jul 12, 2016·4 cites·5 claims
- 0579US8525907B2Solid-state image sensor and imaging systemSAWAYAMA TADASHI·Filed 2011·Granted Sep 3, 2013·2 cites·9 claims
- 0678US9140603B2Photoelectric conversion element, and photoelectric conversion apparatus and image sensing systemCANON KK·Filed 2014·Granted Sep 22, 2015·1 cites·20 claims
- 0778US8723285B2Photoelectric conversion device manufacturing method thereof, and cameraSAWAYAMA TADASHI·Filed 2010·Granted May 13, 2014·2 cites·11 claims
- 0877US7534628B2Method for forming semiconductor device and method for forming photovoltaic deviceCANON KK·Filed 2007·Granted May 19, 2009·5 cites·12 claims
- 0973US6495392B2Process for producing a semiconductor deviceCANON KK·Filed 2001·Granted Dec 17, 2002·17 cites·11 claims
- 1071US8248502B2Photoelectric conversion device and method for making the sameAOKI TAKESHI·Filed 2009·Granted Aug 21, 2012·2 cites·16 claims
- 1170US6287943B1Deposition of semiconductor layer by plasma processCANON KK·Filed 1999·Granted Sep 11, 2001·28 cites·24 claims
- 1269US6313430B1Plasma processing apparatus and plasma processing methodCANON KK·Filed 1999·Granted Nov 6, 2001·26 cites·27 claims
- 1368US7638352B2Method of manufacturing photoelectric conversion deviceCANON KK·Filed 2008·Granted Dec 29, 2009·4 cites·1 claims
- 1468US6737123B2Silicon-based film formation process, silicon-based film, semiconductor device, and silicon-based film formation systemCANON KK·Filed 2002·Granted May 18, 2004·12 cites·22 claims
- 1568US6368944B1Method of manufacturing photovoltaic element and apparatus thereforCANON KK·Filed 2000·Granted Apr 9, 2002·6 cites·6 claims
- 1667US6271055B1Process for manufacturing semiconductor element using non-monocrystalline semiconductor layers of first and second conductivity types and amorphous and microcrystalline I-type semiconductor layersCANON KK·Filed 1998·Granted Aug 7, 2001·28 cites·38 claims
- 1765US6472296B2Fabrication of photovoltaic cell by plasma processCANON KK·Filed 2001·Granted Oct 29, 2002·7 cites·26 claims
- 1864US6436797B1Apparatus and method for forming a deposited film on a substrateCANON KK·Filed 2000·Granted Aug 20, 2002·7 cites·12 claims
- 1961US6162988APhotovoltaic elementCANON KK·Filed 1997·Granted Dec 19, 2000·18 cites·7 claims
- 2059US2009084500A1Processing apparatus, exhaust processing process and plasma processing processCANON KK·Filed 2008·Application pending·0 cites
- 2159US2009114155A1Processing apparatus, exhaust processing process and plasma processing processCANON KK·Filed 2008·Application pending·0 cites
- 2259US2009095420A1Processing apparatus, exhaust processing process and plasma processing processCANON KK·Filed 2008·Application pending·0 cites
- 2359US2009145555A1Processing apparatus, exhaust processing process and plasma processing processCANON KK·Filed 2008·Application pending·0 cites
- 2458US8852987B2Method of manufacturing image pickup deviceCANON KK·Filed 2013·Granted Oct 7, 2014·0 cites·10 claims
- 2556US2008014345A1Processing apparatus, exhaust processing process and plasma processing processCANON KK·Filed 2007·Application pending·0 cites
- 2649US2005161077A1Apparatus for manufacturing photovoltaic elementsCANON KK·Filed 2003·Application pending·0 cites
- 2746US2003124819A1Method of manufacturing photovoltaic element and apparatus thereforFiled 2002·Application pending·0 cites
- 2844US2004161533A1Processing apparatus, exhaust processing process and plasma processing processFiled 2004·Application pending·0 cites
- 2942US8946843B2Solid-state image sensing deviceSAWAYAMA TADASHI·Filed 2010·Granted Feb 3, 2015·0 cites·20 claims
- 3042US2003022519A1Production apparatus of semiconductor layer employing DC bias and VHF powerFiled 2002·Application pending·0 cites
- 3138US2004011290A1Apparatus and process for forming deposited filmFiled 2003·Application pending·0 cites
- 3230US2003164225A1Processing apparatus, exhaust processing process and plasma processingFiled 1999·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →