Inventor · disambiguated record
Tatsuya Shimano
Also filed as: SHIMANO TATSUYA
1 granted patent·1 pending application·0 citations·filing 2020–2020
5Inventor score
Technology areasH10P
Files withSCREEN HOLDINGS CO LTD2
Top patents by PatentIndex Score
2 records- 0139US12387952B2Substrate processing method including thickness monitoringSCREEN HOLDINGS CO LTD·Filed 2020·Granted Aug 12, 2025·0 cites·19 claims
- 0238US2023053059A1Processing condition specifying method, substrate processing method, substrate product production method, computer program, storage medium, processing condition specifying device, and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →