Inventor · disambiguated record
Tae Kyu Son
Also filed as: SON TAE KYU
5 granted patents·3 pending applications·14 citations·filing 2001–2016
70Inventor score
Top patents by PatentIndex Score
8 records- 0157US9287155B2Apparatus and method of controlling chuck, and exposure apparatus and control method thereofKIM JA YUL·Filed 2012·Granted Mar 15, 2016·1 cites·16 claims
- 0256US9069336B2Ultra-precision position control device and method for determining position and attitude information associated with a 6-degree-of-freedom stage thereofKIM JA YUL·Filed 2012·Granted Jun 30, 2015·1 cites·11 claims
- 0354US6490504B2Feeding robot and control method thereforSAMSUNG ELECTRONICS CO LTD·Filed 2001·Granted Dec 3, 2002·12 cites·11 claims
- 0448US9507272B2Apparatus and method of controlling chuck, and exposure apparatus and control method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Nov 29, 2016·0 cites·2 claims
- 0540US8755034B2Maskless exposure apparatus and method to determine exposure start position and orientation in maskless lithographyAHN SUNG MIN·Filed 2011·Granted Jun 17, 2014·0 cites·12 claims
- 0637US2012038307A1Measurement System Using Alignment Unit And Method Of Determining System Parameters Of Alignment UnitAHN SUNG MIN·Filed 2011·Application pending·0 cites
- 0737US2013044938A1Measurement system using alignment system and position measurement methodSAMSUNG ELECTRONICS CO LTD·Filed 2012·Application pending·0 cites
- 0836US2012038936A1Measurement System Using Alignment Unit And Position Measuring MethodAHN SUNG MIN·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →