Inventor · disambiguated record
Tatuharu Yamamoto
Also filed as: YAMAMOTO TATUHARU
4 granted patents·647 citations·filing 1995–2002
85Inventor score
Technology areasH10P
Files withHITACHI LTD4
Top patents by PatentIndex Score
4 records- 0197US6518548B2Substrate temperature control system and method for controlling temperature of substrateHITACHI LTD·Filed 2002·Granted Feb 11, 2003·269 cites·5 claims
- 0297US6394797B1Substrate temperature control system and method for controlling temperature of substrateHITACHI LTD·Filed 2000·Granted May 28, 2002·182 cites·25 claims
- 0390US5981399AMethod and apparatus for fabricating semiconductor devicesHITACHI LTD·Filed 1995·Granted Nov 9, 1999·114 cites·53 claims
- 0486US5628828AProcessing method and equipment for processing a semiconductor device having holder/carrier with flattened surfaceHITACHI LTD·Filed 1995·Granted May 13, 1997·82 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →