Inventor · disambiguated record
Takuya Yanagawa
Also filed as: YANAGAWA TAKUYA
0 granted patents·2 pending applications·0 citations·filing 2010–2019
Top patents by PatentIndex Score
2 records- 0141US2020026316A1Imaging apparatus, imaging system, and imaging methodAIST·Filed 2019·Application pending·0 cites
- 0237US2011141448A1Substrate carrier device, substrate carrying method, substrate supporting member, substrate holding device, exposure apparatus, exposure method and device manufacturing methodNIKON CORP·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →