Inventor · disambiguated record
Tetsuji Arai
Also filed as: ARAI TETSUJI
23 granted patents·1 pending application·739 citations·filing 1982–2005
97Inventor score
Top patents by PatentIndex Score
24 records- 0195US4567352AFlashlight-radiant apparatusUSHIO ELECTRIC INC·Filed 1984·Granted Jan 28, 1986·64 cites·5 claims
- 0295US4550245ALight-radiant furnace for heating semiconductor wafersUSHIO ELECTRIC INC·Filed 1983·Granted Oct 29, 1985·83 cites·6 claims
- 0394US4493977AMethod for heating semiconductor wafers by a light-radiant heating furnaceUSHIO ELECTRIC INC·Filed 1983·Granted Jan 15, 1985·104 cites·5 claims
- 0491US4571486AHeating method of semiconductor waferUSHIO ELECTRIC INC·Filed 1984·Granted Feb 18, 1986·86 cites·3 claims
- 0584US4511788ALight-radiant heating furnaceUSHIO ELECTRIC INC·Filed 1984·Granted Apr 16, 1985·41 cites·3 claims
- 0684US4504323AMethod for annealing semiconductors with a planar source composed of flash discharge lampsUSHIO ELECTRIC INC·Filed 1983·Granted Mar 12, 1985·57 cites·6 claims
- 0783US4535228AHeater assembly and a heat-treatment method of semiconductor wafer using the sameUSHIO ELECTRIC INC·Filed 1983·Granted Aug 13, 1985·38 cites·6 claims
- 0874US5168021AMethod for exposing predetermined area of peripheral part of waferUSHIO ELECTRIC INC·Filed 1990·Granted Dec 1, 1992·33 cites·2 claims
- 0972US4508960ALight-radiant furnaceUSHIO ELECTRIC INC·Filed 1983·Granted Apr 2, 1985·25 cites·1 claims
- 1070US4543472APlane light source unit and radiant heating furnace including sameUSHIO ELECTRIC INC·Filed 1982·Granted Sep 24, 1985·23 cites·3 claims
- 1169US5932886AUltraviolet irradiation deviceUSHIO ELECTRIC INC·Filed 1997·Granted Aug 3, 1999·34 cites·17 claims
- 1269US4578143AMethod for forming a single crystal silicon layerUSHIO ELECTRIC INC·Filed 1983·Granted Mar 25, 1986·15 cites·5 claims
- 1368US4525380AHeating method of semiconductor waferUSHIO ELECTRIC INC·Filed 1984·Granted Jun 25, 1985·27 cites·4 claims
- 1467US5785793AProcess and device for bonding discs to one anotherUSHIO ELECTRIC INC·Filed 1997·Granted Jul 28, 1998·33 cites·5 claims
- 1556US4840876AMethod of treating photoresistsUSHIO ELECTRIC INC·Filed 1988·Granted Jun 20, 1989·11 cites·12 claims
- 1652US5677113AMethod for ashing a photoresist resin film on a semiconductor wafer and an asherUSHIO ELECTRIC INC·Filed 1995·Granted Oct 14, 1997·20 cites·2 claims
- 1752US4842992AMethod of treating photoresistsUSHIO ELECTRIC INC·Filed 1988·Granted Jun 27, 1989·10 cites·2 claims
- 1851US4900938AMethod of treating photoresistsUSHIO ELECTRIC INC·Filed 1989·Granted Feb 13, 1990·9 cites·1 claims
- 1944US2007240637A1Thin-Film Forming ApparatusSONG YIZHOU·Filed 2005·Application pending·0 cites
- 2042US4841342AApparatus for treating photoresistsUSHIO ELECTRIC INC·Filed 1988·Granted Jun 20, 1989·7 cites·7 claims
- 2138US6365899B1Process for determination of blackening of a lampUSHIO ELECTRIC INC·Filed 1999·Granted Apr 2, 2002·6 cites·6 claims
- 2238US4540911AHalogen lamp unitUSHIO ELECTRIC INC·Filed 1982·Granted Sep 10, 1985·5 cites·1 claims
- 2336US4888271AMethod of treating photoresistsUSHIO ELECTRIC INC·Filed 1988·Granted Dec 19, 1989·3 cites·2 claims
- 2433US4882263AMethod of treating photoresistsUSHO DENKI·Filed 1988·Granted Nov 21, 1989·5 cites·2 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →