Inventor · disambiguated record
Teng Kuei Chuang
Also filed as: CHUANG TENG KUEI
5 granted patents·6 citations·filing 2014–2024
70Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD5
Top patents by PatentIndex Score
5 records- 0193US11579539B2Method and apparatus for improving critical dimension variationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Feb 14, 2023·3 cites·20 claims
- 0292US11988972B2Method and apparatus for improving critical dimension variationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted May 21, 2024·2 cites·20 claims
- 0382US12379674B2Method and apparatus for improving critical dimension variationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Aug 5, 2025·0 cites·20 claims
- 0460US9651870B2Method and tool of lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted May 16, 2017·1 cites·15 claims
- 0540US9698014B2Photoresist composition to reduce photoresist pattern collapseTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Jul 4, 2017·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →