Inventor · disambiguated record
Terumi Muguruma
Also filed as: MUGURUMA TERUMI
6 granted patents·1 pending application·253 citations·filing 1990–2004
87Inventor score
Technology areasH10P
Top patents by PatentIndex Score
7 records- 0188US6883539B2Wafer containerTOSHIBA KK·Filed 2003·Granted Apr 26, 2005·43 cites·9 claims
- 0287US6123120AClean storage equipment for substrates and method of storing substratesTOSHIBA KK·Filed 1998·Granted Sep 26, 2000·99 cites·28 claims
- 0383US6926029B2Wafer containerTOSHIBA KK·Filed 2004·Granted Aug 9, 2005·27 cites·9 claims
- 0476US6267123B1Pod and method of cleaning itTOSHIBA KK·Filed 1999·Granted Jul 31, 2001·46 cites·12 claims
- 0567US6422247B2Pod and method of cleaning itTOSHIBA KK·Filed 2001·Granted Jul 23, 2002·10 cites·4 claims
- 0655US5294292APlasma ashing methodTOSHIBA KK·Filed 1990·Granted Mar 15, 1994·28 cites·10 claims
- 0734US2002182037A1Substrate processing apparatus, substrate processing system, and substrate conveying methodSEMICONDUCTOR LEADING EDGE TEC·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →